Recently, Zhejiang Lab (ZJ Lab) held the Forum of Micro and Nano Technology in the Post-Moore's Law Period and the Press Conference on the Nano Fabrication Center, then it officially opened the Zhejiang Lab Nano Fabrication Center to the public for the first time.

With the slowdown of Moore's Law, semiconductor manufacturing is approaching the physical limit, and the post-Moore's Law period is coming. Under such circumstances, micro and nano processing and fabrication become an indispensable sci-tech infrastructure platform for the development of the semiconductor industry. It is also a significant sign of measuring high-end fabrication capability and basic scientific research level.

"The micro and nano processing technology in the post-Moore's Law period is of significance to strengthening China's independent sci-tech innovation ability and international competitiveness. In addition, it will serve as a major pillar for developing information technology, artificial intelligence, Internet of Things, and data centers. ZJ Lab's Nano Fabrication Center has technical processes covering new materials, internationally advanced micro and nano processing equipment, and a team of young and professional engineers. I am convinced the center will help ZJ Lab create a world-leading base for fundamental research and innovation of intelligent computing. I look forward to closer cooperation with ZJ Lab to enhance scientific research and innovation for micro and nano processing", noted YANG Jianyi, Director of ZJU-Hangzhou Innovation Center for Science and Technology in his speech.

YU Hui, a Research Expert at ZJ Lab, introduced that the Lab officially started the construction of the Nano Fabrication Center in June 2021, which was put into trial operation in December 2022. The center has been engaging in the Lab's relevant scientific research projects, fully verifying its processing and testing capabilities.

Covering a floor area of 3,000 m2, the center's clean room is equipped with four major technologies, optoelectronic fusion integration, intelligent sensor, 3D advanced packaging, and new CMOS devices. "It can basically cover most of the original research work, with capability of small-scale mass production", said YU Hui.

Joint contribution and shared benefits are of utmost importance to the Nano Fabrication Center. The press conference attracted many industry experts and entrepreneurs. Noting that ZJ Lab sincerely wishes to have more extensive collaboration with research institutions and enterprises, YU Hui said that "We look forward to your questions to keep improving the scientific research conditions and facilities for the Nano Fabrication Center on the basis of industrial needs. I also hope to develop the Center into a platform for semiconductor pilot process development, a platform for semiconductor equipment and material verification, a platform for high-end chip achievement transformation, and a platform for enterprise incubation."

"Next, ZJ Lab will give full play to the role and functions of the Nano Fabrication Center, partner with domestic and foreign strengths, remain dedicated to new intelligent chip R&D and product development, and make contributions to the automation development of China's semiconductor industry", said YUAN Jixin, Vice President of ZJ Lab in his speech.

BAO Hujun, Vice President of ZJ Lab, presided over the forum. Industrial experts, such as LUO Yi, an Academician of the Chinese Academy of Engineering and Professor at Tsinghua University, attended the forum. In addition, scholars and experts from research institutions and enterprises like Shanghai Jiao Tong University, Suzhou Institute of Nano-Tech and Nano-Bionics, JCET Group, and CUMEC shared their frontier academic research results.